Equipments

CVD-equipments

• "GERO"- furnaces [3- and 2-zone] for the mass-production of carbon nanotubes

• CVD-equipment "Aerosol technique" for the synthesis of multi-walled carbon nanotubes with narrow diameter distribution and defined length

• CVD-equipment for the synthesis of ferromagnetic filled carbon nanotubes

• DC-plasma assisted CVD-equipment for the deposition of carbon nanotubes on Si-wafers

• MW-CVD-equipment for the synthesis of single- and multi-walled carbon nanotubes on substrates

• HiPCO-CVD-equipment for the synthesis of single-walled carbon nanotubes

Electron Microscopy

• High resolution SEM NovenanoSEM from FEI [with low vacuum mode and EDAX]

• SEM XL-30 from FEI with EDAX-system and Microspec analysis system [WDX]

Contacts:

Dr. Albrecht Leonhardt
Department 'Chemical Vapor Deposition'
Institute for Solid State Research (IFF)
IFW Dresden
D-01171 Dresden, Germany

Phone: +49-351-4659-299
Fax: +49-351-4659-440

Email: a.leonhardt@ifw-dresden.de

See also:

Initial page of department CVD