Aerosol-assisted CVD in the cold-wall reactor

In the method, described below, we suggested the catalytic chemical vapor deposition method of single-step synthesis of a well-aligned CNx nanotubes forest coated by nanoparticles of noble metals (Pt, Ru or Pd) and iron. The described materials could act as heterogeneous catalysts in applications where a carbonaceous support is important.

Scheme of used setup

The experimental set-up (‘‘cold-wall reactor’’) is composed of two main parts: an aerosol generator and a vertical quartz tube placed in an inductive heating coil. The device was equipped with three argon inlets: inlet with carrier gas which allows its flow through the aerosol solution, and two additional inlets which enable to dilute the obtained aerosol mixture.

SEM and HRTEM images of aligned CNTs grown on the Si/1000 nm SiO₂ substrate. CNTs have a bamboo-like structure and coated by nanoparticles of noble metal (Pt, Ru or Pd) and iron. 

References:

1. Vyacheslav O. Khavrus, Hartmut Vinzelberg, Joachim Schumann, Albrecht Leonhardt, Steffen Oswald and Bernd Büchner On the potential of long carbon nanotube forest for sensing gases and vapors, Physica E 43 (2011) Nr. 6, P. 1199–1207 URL
2. V. O. Khavrus, A. Leonhardt, S. Hampel, Ch. Taeschner, Ch. Mueller, W. Gruner, S. Oswald, P. E. Strizhak, B. Buechner Single-step synthesis of metal-coated well-aligned CNx nanotubes using an aerosol-technique, Carbon 45 (2007) Nr. 15, S. 2889–2896 URL

Contacts:

Dr. Albrecht Leonhardt
Department 'Chemical Vapor Deposition'
Institute for Solid State Research (IFF)
IFW Dresden
D-01171 Dresden, Germany

Phone: +49-351-4659-299
Fax: +49-351-4659-440

Email: a.leonhardt@ifw-dresden.de

See also:

Initial page of department CVD