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Laser-interferometric SAW Probe

ofw_son2
The demand for the verification of both interdigital transducer design and SAW propagation parameters provides a strong demand for methods able to probe surface acoustic wave fields in typical device structures. Our time-delay interferometric technique offers two dimensional probing of complex valued SAW distribution (amplitude and phase) with high resolution. The principle of the set-up is sketched below:

principl

Measurement of SAW velocity:

  1. Line scanning of complex-valued SAW amplitudes at two different propagation coordinates x1 and x2 (including the area of interest) from the interdigital transducer
    meas_pr

  2. Calculation of both complex-valued angular SAW spectra by FOURIER transform
  3. Calculation of angular dependent SAW phase-velocity from measuring co-ordinates and SAW spectra (see sketch below)
    4. angular_velocity
    Angular dependent SAW phase velocity in different structures

Features:

  • Measuring of SAW fields in real device structures
  • working frequency up to 200 MHz
  • resolution in lateral dimensions down to 25 nm
  • high accuracy SAW phase velocity measurement in typical filter-sized structures
    (relative accuracy up to 10-5)

Contact:

Dr. Hagen Schmidt
IFW Dresden e.V.
'Magnetic and acoustic resonances' (Dept. 15)
Surface Dynamics Group
P.O.Box 270116
D-01171 Dresden, Germany
phone: ++49/351/4659 278
fax: ++49/351/4659 440
e-mail: h.schmidt + @ifw-dresden.de (Sorry, but we try to prevent automatic SPAM)
Contact


 

Dr. Hagen Schmidt
IFW Dresden e.V.
'Magnetic and acoustic resonances' (Dept. 15)
Surface Dynamics Group
P.O.Box 270116
D-01171 Dresden, Germany
phone: ++49/351/4659 278
fax: ++49/351/4659 440
e-mail: h.schmidt + @ifw-dresden.de

(Sorry, but we try to prevent automatic SPAM)