Equipment available at Dept. Micro- and Nanostructures
Electron and Ion Microscopy / Film Analysis
- TEM Tecnai F30 (300kV, FEG, TEM/STEM, GIF, EDX, HAADF, CCD)
- TEM CM 20 FEG (200kV, FEG, TEM/STEM, PEELS, EDX, BF/DF, CCD)
- TEM FEI Titan3 (80-300kV, Monochromator-FEG, Cs-Corrector CETCOR, GIF, EDX, Cube, CCD)
- Various TEM specimen holders (heating, LN2 cooling, double tilt rotation, cooling-straining, and in-situ TEM-STM)
- FIB CrossBeam 1540 XB
- SEM Zeiss Ultra Plus (FEG, EDX, WDX, EBSD)
- SEM Hitachi SN3500 (Variable Pressure)
- Micromanipulators MM3 with RoTip and Gripper for FIB or SEM
- TEM in-situ STM with Nanofactory STM Holder
- XRF Fischerscope XUV 773 X-ray fluorescence spectroscope
Materials Preparation and Film Deposition
- Cluster tool Creavac Creamet 350 CI 6 ("CARMEN")
- Electro Plating
- Local Deposition by Electrons & Ions (EBID & IBID in FIB)
Testing of Microelectronic Devices
- Electromigration and SAW-acoustomigration lifetime testing
- Measuring systems for electric layer resistance and TCR
- Thermo-mechanical cycling with precise stress determination (Wafer Curvature)
Specimen Preparation
- Equipment for TEM specimen preparation and thinning
- Ionthinning (Low-Energy, LN2-cooled, ...)
- NanoMill 1040 (Fischione)
- Electrolytic Thinning (low temperature)
- Plasmacleaner TPS 216 (Binder Labortechnik)
- Ultrathin Wire Saw
- Fine polishing by MultiPrep System (Allied High Tech Products)
- Various tools for metallographic preparation
- Wafer saw DAD 3220 (Disco)
- Deposition of Au & Pd Films
Data Analysis and Modelling
- Analysis of Microstructures
- 3D-Reconstruction
- COMSOL - Multiphysics
- Materials Properties Database
- Software for image simulation and analysis in electron microscopy
- ELDISCA: Windows(TM) based software for evaluation of (point and ring) diffraction patterns.
Download of a demo version is possible here. - Simulation of electron microscopic images and spectra: Java-EMS, Fortran/C-EMS (P. Stadelmann/EPFL), IdealMicroscope (EMLab Software), FEFF8 (University of Washington)
- Image analysis: DigitalMicrograph (Gatan), IDIM (Iterative Digital Image Matching) for the analysis of HRTEM images
- Exit-wave-reconstruction: TrueImage (FEI Company)
- Programming systems: IDL (EXELIS (formerly ITT-VIS, formerly Creaso)), PV-WAVE (Visual Numerics)
- Construction and visualization of crystal structures: CrystalKit (Total Resolution) for interfaces, CrystalMaker (CrystalMaker Software) for crystals
- ELDISCA: Windows(TM) based software for evaluation of (point and ring) diffraction patterns.
- ARXPS Analysis and Simulation
- pca_men: Matlab® based package of routines for factor analysis of electron spectra (AES, XPS, EELS).
Download of a manual is possible here (hitherto German version only: Handbuch Deutsch).
Surface Analysis
- XPS PHI 5600-CI
- Auger Microprobe JEOL JAMP 9500F
- Combined SIMS/XPS PHI6300/Phoibos 100MCD
- AFM (Ultramicroscope attached to OM Jenavert)
- Optical microscopy (Axiotech with long distance objectives, CZ Jena)
- Image analysis system with optical microscope (Leica Q550 with Polyvar II)