Spectroscopy inside TEM (EELS/EDX)

Electron Energy Loss Spectroscopy (EELS)

Example: EEL spectrum of NiO

Basis:

  • Element-specific energy losses of the beam electrons due to the inelastic interaction with the atoms during the penetration of the specimen


Possibilities:

  • Combined with STEM: chemical analysis including bondings on the nanometer scale, especially for light elements
  • Acquisition of linescan intensity profiles and element mappings for analysis of diffusion processes at interfaces and characterisation of segregations

Energy Filtered Transmission Electron Microscopy (EFTEM)

Basis:

  • Element-specific energy losses of the beam electrons due to the inelastic interaction with the atoms during the penetration of the specimen in combination with an imaging filter creating an energy dispersive plane within the optical path


Possibilities:

  • Chemical analysis on the nanometer scale in the fixed beam mode, especially for light elements
  • Acquisition of element mappings for analysis of diffusion processes at interfaces and characterisation of segregations in the fixed beam mode, i.e. with shorter measuring times than in the scanning mode

Energy Dispersive X-ray Spectroscopy (EDXS)

Example: EDX spectrum of NiO

Basis:

  • Emission of X-rays with element-specific energies after excitation of the atoms by the beam electrons during the penetration of the specimen


Possibilities:

  • Combined with STEM: chemical analysis on the nanometer scale, especially for medium-heavy and heavy elements
  • Acquisition of linescan intensity profiles and element mappings for analysis of diffusion processes at interfaces and characterisation of segregations