Equipment for TEM Specimen Preparation

  • Focussed Ar-ion thinning with NanoMill 1040 (Fischione)
  • Wafer saw DAD 3220 (Disco)
  • Wire saw, grinding, polishing, and dimpling machines, ultrasonic cutter
  • Electrolytic thinning at low temperatures (-70°C) with TenuPol-5 (Struers)
  • Plasma cleaner TPS 216 (Binder Labortechnik) for removing contamination and ultra-low energy thinning with special sample holder