Materials for Microelectronics
Examples of research projects carried out:
- Nanoporous low-k dielectrics
- Diffusion Barriers
- Acoustomigration in SAW Devices
- Microstructure of Al/Ti metallizations for SAW finger electrodes
- Electromigration in Cu interconnects
- Analysis of defects in interconnects
- Structure of functional multilayers for GMR and TMR applications
- Fullerene based ultra low-k dielectrics