Department Micro- and Nanostructures
Head of the department
In our department, micro- and nanostructured materials and devices are investigated. This ranges from the basic interaction of Fe with C, the deposition of metals films by various methods up to functional devices and applications based on surface acoustic wave (SAW) technology. Furthermore, modern transmission electron microscopy (TEM) is used to image and characterize nano structured materials on a nanometer scale. The spectroscopic methods we use are Energy Dispersive X-ray Spectroscopy (EDXS) and Electron Energy Loss Spectroscopy (EELS and ELNES). Material classes include thin metallic films, multi layers having special magnetic or electronic properties, molecular nanostructures like graphene or carbon nanotubes, and other interesting materials. Also various in-situ experiments are carried out in the electron microscopes.
Research projects, cooperations, and results
- Molecular nanostructures like Graphene and CNTs (Synthesis and Analysis)
- Surface Acoustic Wave (SAW) devices: Metallizations and Novel Applications
- Structure of bone replacement materials together with the universities Giessen, Heidelberg, and Dresden within the Collaborative Research Centre SFB-TRR 79 "Materials for tissue regeneration within systemically altered bone"
- Metal-matrix composite thin films with e.g. Cu and carbon nanotubes
- In-situ investigation of the transport of metal inside carbon nanotubes (CNT)
- Cu-alloy interconnects for microelectronics and SAW-devices
- Deposition of metals by various techniques for crystalline and amorphous layers and micro-tubes
- Determination of local lattice parameters and strain
- Properties and thermal stability of ultrathin ALD layers like Ta(C, O, N) and Hf-based high-k layers
- Cu/Co multilayers with special interest on interface effects
- Barriers of tunneling magneto resistance devices
- Electromigration and acoustomigration behaviour of Cu-based film systems
- Application and manipulation of filled or un-filled carbon nanotubes for advanced SPM tips, sensors or nano-wiring
- Within the DFG-Forschergruppe FOR520: "Ferroische Funktionselemente: Physikalische Grundlagen und Konzepte" in sub-project B3: Identification of functional relevant electronic states at internal interfaces of perovskitic structures
Methods applied in our group
With modern analytical transmission electron microscopes Tecnai F30 (FEI) and CM20 FEG (Philips) we measure both the geometrical as well as the chemical micro- and even nanostructure of materials. Results can be obtained on:
- the geometric structure (morphology) and the atomistic arrangements with conventional transmission electron microscopy (CTEM), high-resolution transmission electron microscopy (HRTEM) and scanning transmission electron microscopy (BF-/DF-STEM)
- the local crystal structure from electron diffraction (ED) and energy filtered convergent beam electron diffraction (CBED). This gives information about the spacegroup and the lattice of crystals. Additionally radial density distribution functions (RDF) of amorphous materials can be derived.
- the local elemental distribution (chemistry) of heavy elements with energy dispersive X-ray spectroscopy (EDXS) and light elements with electron energy-loss spectroscopy (EELS). Additional techniques allow a real space imaging of the elemental distribution (ESI) and the information of the local bonding of the elements by analysis of the electron energy-loss near edge structure (ELNES).
Vorlesung über Elektronen- und Ionenspektroskopie SoSe 2014
Donnerstags, 4. DS (13:00-14:30) im IFW Dresden, Helmholtzstr. 20, Raum D2E.27
Start: 10. April 2014
Vorlesung mit begleitendem Praktikum
Vorlesungsankündigung Elektronen- und Ionenspektroskopie SoSe 2014 als pdf