Dr. Stefan Harazim

Address:IFW Dresden
Helmholtzstraße 20
01069 Dresden
Telephone number:+49-351-4659-291

Current activities and research


Since 2012 I am the head of the class 1000 clean room of the IFW Dresden. The CR has about 60 users and the CR team consists of four technicians and one SHK member. My aim is to support the IFW members with semiconductor process technology (Lithography, Deposition (e-Beam, sputtering), Etching (dry, wet), Packaging, Analysis, ...) as a kind of scientific process engineer.


My postdoctoral research work includes:

  • establishing an effective technology platform for rolled-up nanotech by

    • improving the process reliability
    • using new materials and depositon methods
    • increasing the production yield
    • enhancing the output by going from chip- to wafer-level production
    • combining different funcitionalities in a single rolled-up system

  • on-chip integration and microfluidic interconnection of multifunctional nanomembranes such as:

    • optofluidic sensors
    • magentofluidic sensors
    • chemical sensors
    • heating elments
    • valves and pumps

  • on-chip optofluidic sensors systems

    • improving sensoric sensitivity and selectivity
    • developing new methods for data readout and signal processing



Projects involved

DFG Research Unit For 1713
Sensoric Micro- and Nanosystems

Journal papers


C. Helke, T. Enderlein, A. Morschhauser, J. Nestler,S.M. Harazim, O.G. Schmidt, T. Otto, T. Gessner: Integration von aufgerollten Nanomembranen mittels MEMS-und Laser-basierten Herstellungsverfahren, Mikrosystemtechnik 2013

L. Baraban, S.M. Harazim , S. Sanchez, O.G. Schmidt: Chemotactic behavior of catalytic motors in microfluidic channels, Angewandte Chemie - International Edition 52 (2013) Nr. 21, S. 5552-5556 URL


S.M. Harazim , V.A. Bolanos Quinones, S. Kiravittaya, S. Sanchez, O.G. Schmidt: Lab-in-a-tube: on-chip integration of glass optofluidic ring resonators for label-free sensing applications, Lab on a Chip 12 (2012), S. 2649-2655 URL

S.M. Harazim , W. Xi, C.K. Schmidt, S. Sanchez, O.G. Schmidt: Fabrication and applications of large arrays of multifunctional rolled-up SiO/SiO2 microtubes, Journal of Materials Chemistry 22 (2012), S. 2878-2884 URL

S.M. Harazim Rolled-up Microtubes as Components for Lab-on-a-Chip Devices, Dissertation URL

E.J. Smith, W. Xi, D. Makarov, I. Moench, S. Harazim , V.A. Bolanos Quinones, C.K. Schmidt, Y. Mei, S. Sanchez, O.G. Schmidt: Lab-in-a-tube: ultracompact components for on-chip capture and detection of individual micro-/ nanoorganisms, Lab on a Chip 12 (2012), S. 1917-1931 URL

A.A. Solovev, W. Xi, D.H. Gracias, S.M. Harazim , C. Deneke, S. Sanchez, O.G. Schmidt: Self-propelled nanotools, ACS nano 6 (2012) Nr. 2, S. 1751-1756 URL


S.M. Harazim , P. Feng, S. Sanchez, C. Deneke, Y. Mei, O.G. Schmidt: Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes, Nanoscale Research Letters 6 (2011) Nr. 1, S. 215/1-8 URL

S. Sanchez, A.A. Solovev, S.M. Harazim , O.G. Schmidt: Microbots swimming in the flowing streams of microfluidic channels, Journal of the American Chemical Society 133 (2011) Nr. 4, S. 701-703 URL

S. Sanchez, A.A. Solovev, S.M. Harazim , C. Deneke, Y.F. Mei, O.G. Schmidt: The smallest man-made jet engine, Chemical Record 11 (2011) Nr. 6, S. 367-370 URL


P. Feng, I. Moench, G. Huang, S. Harazim , J.S. Smith, Y. Mei, O.G. Schmidt: Local-illuminated ultrathin silicon nanomembranes with photovoltaic effect and negative transconductance, Advanced Materials 22 (2010), S. 3667-3671 URL

Y. Mei, S. Kiravittaya, S. Harazim , O.G. Schmidt: Principles and applications of micro and nanoscale wrinkles, Materials Science and Engineering R 70 (2010) Nr. 3-6, S. 209-224 URL


P. Feng, I. Moench, S. Harazim , G. Huang, Y. Mei, O.G. Schmidt: Giant persistent photoconductivity in rough silicon nanomembranes, Nano Letters 9 (2009) Nr. 10, S. 3453-3459 URL