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IFW Institutes
Institute for Complex Materials
Micro/Nano Structures
Methods
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Overview about available methods
The following methods are available and can be performed in the department:
(TEM) Transmission Electron Microscopy
CTEM (Conventional Transmission Electron Microscopy)
ED (Electron Diffraction)
HRTEM (High Resolution Transmission Electron Microscopy)
STEM (Scanning Transmission Electron Microscopy)
EDX (Energy Dispersive X-ray spectrometry)
EELS (Electron Energy Loss Spectrometry)
EFTEM (Energy Filtered Transmission Electron Microscopy)
SEM (Scanning Electron Microscopy)
WDX (Wave Length Dispersive Spectroscopy
EDX (Energy Dispersive X-ray Spectroscopy)
EBSD (Electron Back-Scatter Diffraction)
FIB Focussed Ion Beam
Imaging with Ions
Structuring with Ions
Local Deposition of Metal Films by Ions and Electrons (EBID & IBID)
Glow Discharge Optical Emission Spectrometry (GD-OES)
Surface Analysis
XPS
AR-XPS
AES (Auger Electron Spectrometry)
SIMS
Nanomanipulation (in LM, SEM, FIB, TEM)
Deposition of Films with the Clustertool CARMEN
DC magnetron co-sputtering of metals
HF magnetron sputtering of metals and barrier films
HF magnetron sputtering of insulators
E-beam evaporation of metal