The Powder ALD Lab focuses on the fabrication of thin films on non-planar surfaces and 3D objectsvia Atomic Layer Deposition (ALD). The laboratory features rotary reactors with different steel and quartz tubes where particle substrates can be coated. Besides oxides and ferromagnetic materials the research is currently extended towards biocompatible materials, layered materials, topological insulators and ferecrystals.
Rotary reactor for thermal ALD on powders (Veeco Savannah S200 with Particle Coating option)
3x thermal ALD reactors (Veeco Savannah S300 (2x) and S100 (1x))
Home made ALD reactor