sputter facility for thin film deposition


HostLeibniz Institute for Solid State and Materials Research Dresden
AddressHelmholtzstraße 20
01069 Dresden
Phone / Fax+49 (0) 351 46 59-0 / +49 (0) 351 46 59 540
E-MailContact Addresses
RepresentativesProf. Dr. Bernd Büchner, Scientific Director
Juliane Schmidt, Administrative Director
Register / Ust-IDNr.
VR Dresden Nr.: 1369 / DE 140 303 135
Research Organisation Registry (ROR)



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