Combined SIMS / XPS - Spectrometer PHI 6300 / Phoibos 100MCD

  • System based on a PHI 5600 vacuum vessel from EUROVAC, equipped with the SIMS component PHI 6300 (Physical Electronics) computerized by a solution of RBD Enterprises and the XPS system PHOBOS 100 (SPECS).
  • Pumped by a combination of a Ti ion getter pump and a Ti sublimation pump, base pressure 10-7 Pa, fast load lock for 1 inch sample holders compatible with the PHI-system.
  • Sample inspection with an optical zoom microscope.



  • trace element analysis with mass spectrometry of secondary ions produced by ion beam bombardment
  • primary ions from a microfocus (5 ... 30 nm diameter depending on element) ion column, scan up to 3 mm * 3 mm, ions O2+, Ar+ (Duoplasmatron), or Cs+ (evaporation source) 1.5 to 5 keV
  • mass analysis with a quadrupol-mass analyzer (BALZERS 1....255 u) with electrostatic sector field, ion detection with channeltron
  • dynamic range 1 to 106 counts/s, electronic gate selectable in area
  • charge compensation with an electron gun (SPECS)
  • simple function for elemental mapping: automatic conversion to bmp files with 256 steps
  • Analytical features



  • quantitative element analysis at surfaces of solid materials by spectroscopy of emitted photo electrons, information of the chemical states by analysis of peak-shift or peak-shape changes
  • excitation by Al-Ka or Mg-Ka X-rays (300 W)
  • electron analysis with a 100 mm diameter hemisperical energy analyzer with 5-channel multi-channelplate detector, pass energy variable up to 660 eV, best energy resolution at Ag3d = 0.95 eV
  • local analysis (best in the region of 300 µm) by a special lens-system, different analyzer modes in area and transmission properties, also for LEIS, UPS, ISS
  • sputtering with a SPECS IQ 12-38 ion gun typically by noble gas ions (e.g. Ar+) for surface cleaning and depth profiling, 3 mm * 3 mm scan region, 1 nm / min sputtering rate
  • analysis of non-conducting samples, additional electron flood gun
  • possibility of surface investigation by light ion scattering (ISS) with the SPECS ion gun, low-sophisticated Auger analysis possible (W-cathode, 0.1 mm beam size)
  • UHV-coupling with preparation chambers possible (same system as PHI 5600 CI)