SEM Zeiss Ultra Plus

Our SEM Ultra Plus (Zeiss) is a high-resolution SEM with:

  • FEG source (Schottky type)
  • EDX  for elemental analysis with peltier cooled Si(Li) detector (Oxford Instruments)
  • WDX  for elemental analysis (Oxford Instruments)
  • EBSD system (Oxford Instruments) for local orientation analysis
  • Gas injection charge compensation system


Special characteristics of the system:

  • primary energy 0.02 - 30 keV, beam current 12 pA to 40 nA
  • Complete detection system with ESB, Inlens, AsB, and Everhart Thornley detector
  • Insensitive to charging effects, gas injection charge compensation system