Research Topics

Surface Acoustic Waves: Concepts, Materials & Applications:

  • Preparation, microstructure investigation and structuring of functional thin films (e.g. metallization layers, dielectrics, piezoelectrics)
  • SAW devices and damage processes by acoustomigration
  • Technology platform for SAW-based microfluidic actuation
  • Surface Acoustic Wave (SAW) based aerosol generation / fluid atomization
  • Backend chip processing (e.g. dicing, wire bonding)
  • Thin film analytics
  • ...for further information please visit SAWLab Saxony




Analytical Methods:


Materials and Devices for Microelectronics:


Deposition processes:


Composite Materials: