Technology Platform for SAW-based Microfluidic Actuation
Surface Acoustic Wave (SAW) actuators can be widely used in microfluidics, e.g. for pumping or mixing in small volumes, as acoustic tweezers, for fluid atomization or for droplet actuation. However, the structural design and fabrication of energy-efficient SAW-actuators require strong expertise regarding electroacoustic and acoustofluidic fundamentals as well as technological know how. In order to extend the applicability of such devices, we developed a technology platform with high reliability, experimental flexibility and compatibility.