At Ruhr University Bochum we have an excellent infrastructure for thin film analysis. A broad variety of methods and devices enables a comprehensive characterization of thin films with respect to composition, structure, and morphology.
Frequently employed, group internally accessible techniques comprise (grazing incidence) X-ray diffraction (GI-XRD ), X-ray reflectometry (XRR ), infrared spectroscopy (IR ), Filmetrics, UV/Vis spectroscopy, and contact angle measurements. At the facilities of our collaboration partners at Ruhr University Bochum we have access to X-ray photoelectron spectroscopy (XPS ), Rutherford backscattering spectroscopy and nuclear reaction analysis (RBS/NRA ), Raman spectroscopy, ellipsometry, scanning electron microscopy (SEM ), transmission electron microscopy (TEM ) and atomic force microscopy (AFM ).
