Element-specific energy losses of the beam electrons due to the inelastic interaction with the atoms during the penetration of the specimen
Possibilities:
Combined with STEM: chemical analysis including bondings on the nanometer scale, especially for light elements
Acquisition of linescan intensity profiles and element mappings for analysis of diffusion processes at interfaces and characterisation of segregations
Energy Filtered Transmission Electron Microscopy (EFTEM)
Basis:
Element-specific energy losses of the beam electrons due to the inelastic interaction with the atoms during the penetration of the specimen in combination with an imaging filter creating an energy dispersive plane within the optical path
Possibilities:
Chemical analysis on the nanometer scale in the fixed beam mode, especially for light elements
Acquisition of element mappings for analysis of diffusion processes at interfaces and characterisation of segregations in the fixed beam mode, i.e. with shorter measuring times than in the scanning mode
Example: EDX spectrum of NiO
Energy Dispersive X-ray Spectroscopy (EDXS)
Basis:
Emission of X-rays with element-specific energies after excitation of the atoms by the beam electrons during the penetration of the specimen
Possibilities:
Combined with STEM: chemical analysis on the nanometer scale, especially for medium-heavy and heavy elements
Acquisition of linescan intensity profiles and element mappings for analysis of diffusion processes at interfaces and characterisation of segregations
