The IMW runs Physical Vapor Deposition (PVD) laboratories with two Pulsed Laser Deposition (PLD) clusters as well as two sputter deposition systems. The setup includes several UHV chambers with load lock systems for the preparation of epitaxial and polycrystalline ferroelectric and superconducting thin films as well as for oxide heterostructures. Besides state-of-the-art RHEED systems for in-situ control of film growth, specialized systems are available for ion-beam assisted and off-axis PLD.
Dr. Ruben Hühne
Research Group “Functional Oxide Layers and Superconductors”
Room A 3E.06.1