Main component of the outgassing analyzer is a UHV chamber with a volume of 10 liters. At a pressure of 1x10-05 mbar a quadrupol mass spectrometer can be used. Since the mass spectrum of the empty chamber is known, it can be compared with the residual gas using a sample and conclusions regarding the outgassing behaviour of the sample can be drawn. In order to examine the outgassing behavior of samples under the influence of temperature, the sample holder is equipped with a stepless temperature control.
| Achievable final pressure of approx. 8 x 10-8 mbar without additional lock chamber |
| Can be loaded via quick-release door with a diameter of 100 mm |
| Heatable specimen holder with a base area of 55 x 55 mm |
| Stepless temperature control up to max. 450 ° C. |
| Residual gas analysis by means of mass spectrometer up to a mass number of 200 |
