Microscopy

Scanning electron microscope (SEM) GEMINI Leo 1530, incl. EDX- and EBSD-system

Manuf.: Zeiss
e^--source: Schottky field emission gun
Accelerating voltage: 0.2–30 kV
High resolution imaging with SE, BSE and InLens-detectors down to 3 nm
Magnification: 20X–900,000X
5-axis sample stage enables tilting and rotation
Element analysis by EDX (Bruker XFlash 4010)
Analysis of grain orientations and structures by EBSD (Bruker e^-Flash^HR+)
Investigations of magnetic samples possible
Extensions: heating table up to 500 °C, DDS32 tensile/compression module (K&W), TKD head for EBSD detector

_{Photos: N. Geißler / IFW Dresden, M. Otto / IFW Dresden}