

Operates at 300 kV accelerating voltage and is equipped with:
| Specimens: | Thickness 5 - 300 nm, diameter 3 mm |
|---|---|
| Holders: | Single tilt low background (+- 40° tilt), double tilt low background, double tilt low background with cooling (liquid N2), double tilt rotation holder, in-situ straining holder, in-situ STM holder |
| Resolution: | Point res. 0.19 nm, Information limit 0.12 nm |
| Magnification: | 70 x - 18 Mill. x |
| STEM: | Resolution 0.2 nm (Mag. up to 230 Mill. x) BF-, DF-, HAADF-detectors |
| EDXS: | Lateral resolution < 2 nm. Detection of all chemical elements with Z >= 5 (Bor), detection limit 0.5 %, correctness 20 % |
| EELS: | Lateral resolution < 1 nm. Energy resolution < 1 eV. Especially effective for light elements (e.g. B, C, N, O), detection limit very matrix dependent, >= 0.5 %, correctness 30 % |
| Energy filtered imaging: | Lateral resolution < 1 nm, energy resolution about 1 eV. |
Information from Equipment & Facilities from Micro/Nano Structures at Structure Analysis
| Name of contact person | group/department | telephone number | email address |
| Dr. Thomas Gemming | Structure Analysis | -298 | T.Gemming(at)ifw-dresden.de |