At Ruhr University Bochum we have an excellent infrastructure for thin film analysis. A broad variety of methods and devices enables a comprehensive characterization of thin films with respect to composition, structure, and morphology.
Frequently employed, group internally accessible techniques comprise (grazing incidence) X-ray diffraction (GI-XRD
), X-ray reflectometry (XRR
), infrared spectroscopy (IR
), Filmetrics, UV/Vis spectroscopy, and contact angle measurements. At the facilities of our collaboration partners at Ruhr University Bochum we have access to X-ray photoelectron spectroscopy (XPS
), Rutherford backscattering spectroscopy and nuclear reaction analysis (RBS/NRA
), Raman spectroscopy, ellipsometry, scanning electron microscopy (SEM
), transmission electron microscopy (TEM
) and atomic force microscopy (AFM
).
