Facilities

• Equipment and software for chip design, lithography preparation and analysis
• FEM infrastructure (Comsol Multiphysics) in fast standalone machines and access to computation cluster
• Specific deposition equipment (CARMEN and SIGGI) for the deposition of complex thin films on piezo- and pyroelectric substrates for magnetron sputtering and e-beam evaporation, including in-situ measurement technology
• (Access to) rapid prototyping laser and electron beam lithography (Heidelberg Instruments MLA100, µPG 101, EBL Voyager)
• Custom ovens for thermal treatment of samples up to 1000°C under different atmospheric conditions (vacuum, inert gas, forming gas) as well as for sensor interrogation
• Dedicated tools for acoustically driven microfluidics (e.g. syringe pumps (Cetoni neMESYS), pressure pumps (Fluigent LineUP, Bartels mp6), valves, flow sensors, dedicated RF signal sources
• 3D super inkjet printer (SIJ S050), fluid dispenser and contact angle measurement setup
• Dispersion analyzer (Lumisizer) and aerosol spectrometer (WELAS)
• Wafer prober station (MPI TS 150) equipped with vector network analyzer (Keysight E5080B ENA), heatable stage and rf/dc probes
• Digital optical microscope (Keyence VHX 7000) and high-speed camera (Ametek VEO 410)
• X-Ray fluorescence analysis (Fischerscope XUV773)
• Mechanical Surface profilometry (Bruker Dektak XT)
• Custom high-temperature, UHV 2D film stress-measurement system (ANNE)
• Equipment for electrical (RF and DC) device parameters measurement, e.g. resistivity / sheet resistance and S-Parameters, up to high temperatures and in inert atmosphere

Contact

Dr. Andreas Winkler

Head of Research Group "Acoustic Microsystems"

Room:     B 2E.10
Phone:   +49 351 4659 575

E-mail