Head of Clean Room

Ronny Engelhard
- Office:  B 1E.02
- Phone: +49 (0) 351 4659 655
E-mail

Technical Staff

Martin Bauer

  • e-Beam Lithography & Design (EBL)
  • Optical Lithography 
  • e-Beam Deposition

Jenny Luckau

  • Chemical Vapor Deposition (CVD)
  • White Lab Processes
  • Greyscale Litho
  • Trainees

Kristina Leger

  • Chemical Vapor Deposition (CVD)
  • Chemical Processes
  • Polymer Synthesis
  • Safety

Sandra Nestler

  • Ion Beam Etching (IBE)
  • Reactive Ion Dry Etching (RIE)
  • Atomic Layer Deposition (ALD)
  • Optical  Lithography
  • Trainees

Liesa Raith

  • SEM & FIB
  • Reactive Ion Dry Etching (RIE)
  • Atomic Layer Deposition (ALD)
  • Safety