Ronny Engelhard
- Office:  B 1E.02
- Phone: +49 (0) 351 4659 655
E-mail

Martin Bauer

• e-Beam Lithography & Design (EBL)
• Optical Lithography 
• e-Beam Deposition

Jenny Luckau

• Chemical Vapor Deposition (CVD)
• White Lab Processes
• Greyscale Litho
• Trainees

Kristina Leger

• Chemical Vapor Deposition (CVD)
• Chemical Processes
• Polymer Synthesis
• Safety

Sandra Nestler

• Ion Beam Etching (IBE)
• Reactive Ion Dry Etching (RIE)
• Atomic Layer Deposition (ALD)
• Optical  Lithography
• Trainees

Liesa Raith

• SEM & FIB
• Reactive Ion Dry Etching (RIE)
• Atomic Layer Deposition (ALD)
• Safety