Auger Microprobe JEOL JAMP 9500F

Features

• automatic UHV vacuum system, pressure typical 5*10^-7 Pa
• fast sample transfer (5 min)
• automated sample stage with probe tracking function

Excitation Source

• Field emission electron gun, ~20 nm min. spot size for Auger analysis, 3…30 keV primary energy
• 1 pA... 200 nA electron current, typical for Auger analysis: 10keV, 10 nA

Detection System

• hemispherical analyser energy range 0…2500 eV
• CRR mode: retarding ratio = 0.32 (normal mode) ... 0.02 (high resolution)
• constant pass energy mode (CAE) for XPS analysis
• 7 channel detector with open channeltrons
• secondary electron detector with scintillator system

Sputtering System

• differentially pumped ion gun 500…3000 eV (sputter gas: mainly Ar)
• low energy ion production for charge neutralization possible
• (compucentric) sample rotation to minimize ion beam induced roughening during sputtering

Additional Capabilities:

• in-situ impact fracture stage for analysis of grain boundaries and other internal surfaces
• EDX system QUANTAX 400 for quantitative micro analysis
• transfer chamber for sample transport in noble gas atmosphere from glove-box
• X-ray source (SPECS Al- Mg-anode, non monochromatic) for XPS analysis, local spatial resolution in 2-mm-range by use of a collimator

Software for analysis in electron spectroscopy

• PHI MultiPak®: software for evaluation AES spectra and maps (Physical Electronics)
• pca_men: Matlab® based package of routines for factor analysis of electron spectra (IFW)
  Download of a manual is possible here (hitherto German version only: Handbuch Deutsch).
• pca_image: Matlab® based package of routines for factor analysis of elemental maps (IFW)