System based on a PHI 5600 vacuum vessel from EUROVAC, equipped with the SIMS component PHI 6300 (Physical Electronics) computerized by a solution of RBD Enterprises and the XPS system PHOBOS 100 (SPECS).
Pumped by a combination of a Ti ion getter pump and a Ti sublimation pump, base pressure 10-7 Pa, fast load lock for 1 inch sample holders compatible with the PHI-system.
Sample inspection with an optical zoom microscope.
SIMS
trace element analysis with mass spectrometry of secondary ions produced by ion beam bombardment
primary ions from a microfocus (5 ... 30 nm diameter depending on element) ion column, scan up to 3 mm * 3 mm, ions O2+, Ar+ (Duoplasmatron), or Cs+ (evaporation source) 1.5 to 5 keV
mass analysis with a quadrupol-mass analyzer (BALZERS 1....255 u) with electrostatic sector field, ion detection with channeltron
dynamic range 1 to 106 counts/s, electronic gate selectable in area
charge compensation with an electron gun (SPECS)
simple function for elemental mapping: automatic conversion to bmp files with 256 steps
Analytical features
XPS
quantitative element analysis at surfaces of solid materials by spectroscopy of emitted photo electrons, information of the chemical states by analysis of peak-shift or peak-shape changes
excitation by Al-Ka or Mg-Ka X-rays (300 W)
electron analysis with a 100 mm diameter hemisperical energy analyzer with 5-channel multi-channelplate detector, pass energy variable up to 660 eV, best energy resolution at Ag3d = 0.95 eV
local analysis (best in the region of 300 µm) by a special lens-system, different analyzer modes in area and transmission properties, also for LEIS, UPS, ISS
sputtering with a SPECS IQ 12-38 ion gun typically by noble gas ions (e.g. Ar+) for surface cleaning and depth profiling, 3 mm * 3 mm scan region, 1 nm / min sputtering rate
analysis of non-conducting samples, additional electron flood gun
possibility of surface investigation by light ion scattering (ISS) with the SPECS ion gun, low-sophisticated Auger analysis possible (W-cathode, 0.1 mm beam size)
UHV-coupling with preparation chambers possible (same system as PHI 5600 CI)
