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Eine junge Frau arbeitet an einer Glovebox im Chemielabor des IFW Dresden.


SEM Zeiss Ultra Plus

SEM in our lab

(FEG, EDX, WDX, EBSD)

Our SEM Ultra Plus (Zeiss) is a high-resolution SEM with:

  • FEG source (Schottky type)
  • EDX  for elemental analysis with peltier cooled Si(Li) detector (Oxford Instruments)
  • WDX  for elemental analysis (Oxford Instruments)
  • EBSD system Symmetry S3 (Oxford Instruments) for local orientation analysis
  • Gas injection charge compensation system

Special characteristics of the system:

  • primary energy 0.02 - 30 keV, beam current 12 pA to 40 nA
  • Complete detection system with ESB, Inlens, AsB, and Everhart Thornley detector
  • Insensitive to charging effects, gas injection charge compensation system

Information from Equipment & Facilities from Micro/Nano Structures at Structure Analysis

Name of contact person group/department telephone number email address
Dr. Thomas Gemming Structure Analysis -298 T.Gemming(at)ifw-dresden.de