

Behind every research project is a team driven by curiosity, collaboration, and a passion for discovery. Researchers, students, and guests from diverse backgrounds contribute their expertise to create a dynamic and international scientific environment. Together, the group explores new ideas, develops innovative materials, and advances technologies for future applications.

Prof. Dr. Anjana Devi
Group Leader
email: a.devi@ifw-dresden.de
room: A 2E.10
phone: +49 351 4659 333
Thai Ngan Do
Postdoc – Humboldt Research Fellow
email:t.n.do@ifw-dresden.de
phone:
Dr. Meghamala Sarkar
Postdoc
eMail: m.sarkar@ifw-dresden.de
phone.: 608
Dr. Maxime Steinmetz
Postdoc
email: Steinmetz, Dr. Maxime
phone: 501
Dr. Jorit Obenlüneschloß
Postdoc
eMail: j.obenlueneschloss@ifw-dresden.de
tel.: 669
Marcel Schmickler
PhD student
email: m.schmickler@ifw-dresden.de
phone: 489
Cuno Zander
PhD student
email:c.zander@ifw-dresden.de
phone: 481
2025
Florian Preischel
New Pathways Towards 2D-Type Materials: Development of Precursors and Processes for Metal Oxides and Metal Sulfides
Jean-Pierre Jürgen Glauber
Transition Metal-Based Thin Film Materials for Energy and Electronic Applications
Jorit Obenlüneschloß
Exploring New Precursor Chemistries for Ru, Li, Zn, and Co: Implementation in MOCVD and ALD Processing of Functional Materials
→ corresponding highlight of the Institute
2024
Jan-Niklas Huster
Development of Aluminium, Ruthenium and Tin Complexes as New Precursors for Thin Film Processing via Vapor Phase Deposition Methods
Martin Wilken
Chemical Strategies in Vapour Phase Deposition Techniques for Nanostructured Transition Metal Sulfide and Oxide Thin Films
2025
Pierre-Alexandre Daniel Escarcega
Nanostructured thin films of functional materials: Synthesis and characterisation,
| 2021 | Dr. Dennis Zywitzki | Chemical Vapor Deposition of Ternary Materials for Energy Storage and Conversion |
| 2021 | Dr. Sebastian Beer | Vapor phase deposition of metal oxide and sulfide thin films:A study on the interplay between precursor design, process development and functional properties |
| 2020 | Dr. Lukas Mai | Investigation of amino-alkyl coordinated complexes as new precursors class for atomic layer deposition of Aluminum, Tin and Zinc oxide thin films and their application |
| 2019 | Dr. Alexander Sadlo | Liquid and vapor phase syntheses of inorganic materials: From metal organic molecules to thin film deposition |
| 2018 | Dr. Richard O’Donoghue | Atomic layer deposition of ZnO and Ga2 O3 thin films as transparent semiconducting oxides: Influence of precursors on the film growth and characteristics |
| 2018 | Dr. Maximilian Gebhard | Plasma-enhanced atomic layer deposition of binary metal oxides as gas barrier layers on polymers |
| 2018 | Dr. Sarah Karle | From molecules to materials: Rational design and development of group 11 and Group 14 complexes and their evaluation as precursors for the deposition of metal and metal oxide thin films |
| 2018 | Dr. Stefan Cwik | Metal nitride and metal disulfide thin films via CVD: Exploring the diversity of all nitrogen coordinated rare earth and group 6 precursors |
| 2017 | Dr. Jiyeon Kim | Organometallic chemistry of transition metal – group 13 complexes and metal-organic precursor synthesis for ALD cobalt oxide thin films |
| 2016 | Dr. Daniel Peeters | Chemical vapor synthesis of binary and ternary metal oxides for photocatalytic and sensing applications |
| 2014 | Dr. Manish Banerjee | Design, synthesis and evaluation of guanidinates, ketoiminates and aminoalkoxide based precursors for thin film deposition of ZrO2 and TiO2 |
| 2014 | Dr. Nagendra B. Srinivasan | MOCVD of metal nitride thin films: Deposition, film characteristics, functional properties |
| 2014 | Dr. Michael Krasnopolski | Metalorganic Chemical Vapor Deposition (MOCVD) routes for fabrication of rare earth nitride thin films: Precursor evaluation, thin film deposition and characterization |
| 2014 | Dr. Vanessa Gwildies | Gaining energy with sunlight: Photoelectrochemical water splitting of nitrogen doped tungsten oxide thin films fabricated by MOCVD using a new tungsten precursor |
| 2014 | Dr. Sun Ja Kim | MOCVD if TiO2 thin films from Ti alkoxide and amide based precursors for photoelectrochemical applications |
| 2013 | Dr. Ke Xu | Contributions towards ALD and MOCVD of rare earth oxides and hafnium oxide: From precursor evaluation to process development and thin film characterisation |
| 2013 | Dr. Tobias Thiede | From molecules to functional materials: Systematic evaluation of all nitrogen coordinated guanidinato and amidinato metalorganic complexesas precursors for the MOCVD of metal nitride thin films |
| 2011 | Dr. Malte Hellwig | Vapor phase approaches to nanostructured thin films of transparent metal oxides: From precursor development to application |
| 2010 | Dr. Andrian P. Milanov | MOCVD and ALD of rare-earth containing multifunctional materials: From precursor chemistry to thin film depositions and applications |
| 2005 | Dr. Urmila Patil | Precursors for MOCVD of ZrO2 and HfO2 thin films as gate dielectrics in CMOS devices (joint PhD student with Prof. Dr. R. A. Fischer) |
| 2005 | Dr. Raghunandan Bhakta | Rational development of precursors for MOCVD of TiO2 : Precursor chemistry, thin film deposition, mechanistic studies |
| 2012-2014 | Dr. Van Son Dang | EU-FP-7-ITN-Marie Curie Fellow | MOCVD and evaluation of high-k oxide thin films |
| 2010-2011 | Dr. Mrinalini G. Walwalkar | Alexander von Humboldt (AvH) post-doctoral fellow | Carboxylate based precursors for the MOCVD of Ba and Sr titanates |
| 2007-2009 | Dr. Ramasamy Pothiraja | Alexander von Humboldt (AvH) post-doctoral fellow | Development of novel molecular precursors for thin film deposition of metal oxide and metal nitride films by metalorganic chemical vapor deposition |
| 2019 | Annika Krusenbaum, M.Sc. | Development and Characterization of All-Nitrogen Coordinated Zirconium Complexes as New Precursors for Vapor Deposition Processes |
| 2019 | Daniel Baier, M.Sc. | Zinc Based Binary and Ternary Oxides via MOCVD: Precursor Synthesis, Thin Film Fabrication and Investigation of Functional Properties |
| 2019 | Jan-Niklas Huster, M.Sc. | Molecular Engineering of Tin Complexes for Vapor- and Solution-Based Processing of Tin Oxide Thin Films |
| 2019 | Martin Wilken, M.Sc. | Synthesis, Characterization and Thermal Evaluation of Sulfur Coordinated Transition Metal Complexes as Precursors for Transition Metal Disulfides |
| 2018 | Jan-Lucas Wree, M.Sc. | Vapor Phase Routes to Functional Molybdenum Sulfide Employing Engineered Precursors |
| 2018 | David Zanders, M.Sc. | Novel Hafnium and Tin precursors -Tuning Precursor Chemistry for Plasma Enhanced and Conventional Atomic Layer Deposition Processes |
| 2018 | Nils Boysen, M.Sc. | Rational Design of new NHC-based Coinage Metal Complexes and the Deposition of Coinage Metal Containing Thin Films by CVD and ALD |
| 2018 | Shafiqur Rahman, M.Sc. | Chemical Solution Deposition of Binary and Ternary Metal Oxides: Film fabrication, Characterization and Evaluation of Functional Properties |
| 2017 | Sebastian Beer, M.Sc. | Novel MOCVD routes to metal sulfide thin films: Influence of precursor chemistry and investigation of film characteristics |
| 2017 | Dennis Zywitzki, M.Sc. | Vapor phase routes to Co and Fe based binary and ternary oxides: Thin film fabrication, evaluation and investigation of functional properties |
| 2017 | Philipp John, M.Sc. | Deposition and characterization of HiPIMS layers for solar thermal power plants |
| 2017 | Amr Saad Mohamed, M.Sc. | Preparation and characterization of ferroelectric polymer nanoparticles composites |
| 2016 | Zongji Zhang, M.Sc. | Chemical vapor conversion of metal oxide thin films to metal organic frameworks |
| 2016 | Kai junge Puring, M.Sc. | Synthesis, characterization and evaluation of transition metal complexes for MOCVD of binary and ternary metal oxides |
| 2016 | Alexander Kroll, M.Sc. | GaN based absorber materials for photocatalysis via MOCVD |
| 2016 | Lukas Mai, M.Sc. | Tuning precursor chemistry and development of atomic layer deposition processes for functional aluminium oxide layers |
| 2014 | Alexander Sadlo, M.Sc. | Optimizing the formulation of solution-based materials to various application techniques towards printable electronics |
| 2014 | Kevin Schiemann, M.Sc. | Development and characterization of diffusion barrier layers for metal-supported solid oxide fuel cells |
| 2013 | Sarah Karle, M.Sc. | Rational design and development of rare earth precursors and their application in MOCVD and ALD for the fabrication of rare earth containing thin films |
| 2013 | Maximilian Gebhard, M.Sc. | Atomic layer deposition of indium oxide thin films employing In-tris-guanidinates and water as precursors |
| 2013 | Stefan Cwik, M.Sc. | Atomic vapor deposition (AVD) of Y2 O3 and HfO2 and yttria stabilized hafnia thin films tuning precursor chemistry: Process optimization and evaluation of functional properties |
| 2012 | Daniel Peeters, M.Sc. | Evaluation of Zn-ketoiminates as precursors for atomic layer deposition of zinc oxide |
| 2010 | Louay Alsamman, M.Sc. | Beiträge zur ALD von HfO2 auf SAMs |
| 2010 | Michael Krasnopolski, M. Sc. | Synthesis and evaluation of all-nitrogen coordinated precursors for rare-earth containing thin films |
| 2008 | Ke Xu, M.Sc. | Synthesis of new hafnium and zirconium based precursors and MOCVD HfO2 thin films using newly developed hafnium precursors |
| 2007 | Daniela Bekermann, M.Sc. | MOCVD of metal oxy-nitrides of niobium using nitrogen coordinated precursors: Thin film deposition and mechanistic studies |
| 2006 | Dipl. Chem. Malte Hellwig | Development and applications of amide based molecular precursors for MOCVD of functional oxides |
| 2005 | Dipl. Chem. Arne Baunemann | Synthesis and characterization of organometallic precursors for gate oxide materials |
| 2005 | Andrian Milanov, M.Sc. | Development of new metal organic precursors for HfO2 MOCVD |
| 2020 | Isabelle Arentz | Rationale Entwicklung von Münzmetallpräkusoren für die Anwendung in CVD und ALD |
| 2019 | Florian Preischel | Alternative Synthetic Routes towards Metal-Organic Precursors and their Thermal Evaluation for Vapor Phase Techniques |
| 2018 | Jean-Pierre Glauber | Synthesis and Characterization of Rare-Earth Complexes as Potential Precursors for Rare-Earth Sulfides in Chemical Vapor Deposition |
| 2018 | Laura Lamkowski | Synthesis and Characterization of Co an Ni containing Precursors for MOCVD application |
| 2017 | Annika Krusenbaum | Synthesis and characterization of metalorganic copper, molybdenum and antimony complexes as precursors for vapor deposition processes |
| 2017 | Jens Handelmann | Molecular Engineering of Gallium Ketoiminate Complexes: Potential Precursors for Ga2 O3 |
| 2016 | Martin Wilken | All nitrogen coordinated tungsten complexes as metalorganic precuirsors for CVD and ALD |
| 2016 | David Zanders | Rational evaluation of zinc and gallium precursors for the generation of transparent and conducting oxides |
| 2016 | Nils Boysen | Synthesis and Evaluation of Metalorganic Yttrium and Copper Compounds as Precursors for CVD and ALD |
| 2016 | Micha Weinert | Synthesis and characterisation of intramolecularly nitrogen stabilised organoaluminium complexes as possible precursors for chemical vapor deposition |
| 2015 | Philipp John | Rational development of Zn and Ga complexes as precursors for CVD and ALD of transparent conducting oxides |
| 2015 | Jonas Weidner | Kupfer Ketominate und Aluminium amidobasierte metallorganische Komplexe als m ögliche Precursor für CVD-, CSD- und ALD- Anwendungen |
| 2015 | Sebastian Beer | Rational development of metalorganic complees of yttrium, gadolinium and neodymium as potential precursors for rare earth nitrides |
| 2014 | Tobias Heinen | Heteroleptic complexes of In(III) as potential precursors for MOCVD of indium oxide thin films |
| 2014 | Katarina Lowjaga | Synthesis and Characterisation of an iron ketoiminate compound as a potential precursor for vapour phase deposition of iron oxide thin films |
| 2012 | Jens Grohmann | Synthese und Charakterisierung von Gadolinium- und Yttrium-Amidinaten. Erforschung von Präkursoren für die chemische Dampfabscheidung von Nitriden der Seltenen Erden |
| 2011 | Qiongwen Wang | Evaluation of nitrogen and carbon doped tungsten oxide thin films for photoelectrochemical water splitting application |
| 2011 | Stefan Barwe | Synthese und Charakterisierung eines neuen Zn1-Sandwich-Komplexes |
| 2010 | Sarah Karle | Synthese und Charakterisierung von Ketominat-basierte Seltenerdkomplexen als potentielle MOCVD-Precursor |
| 2008 | Stefan Cwik | Metalorganic chemical vapor deposition of Y2 O3 thin films employing tris-guanidinato yttrium precursors |
| 2007 | Ke Xu | Synthesis of metalorganic complexes of hafnium for MOCVD and ALD of HfO2 thin films |