Acoustic Microsystems

The research team Acoustic Microsystems understands itself as a reliable scientific partner for the realization and analysis of next generation microacoustic devices for various fields of applications. Our R&D is strongly oriented towards lab demonstrator development, device validation in real-world environments, and technology transfer towards industry. However, to understand the governing effects on the micro- and nanoscale and to make them practically usable, we also carry out selected fundamental investigations. Furthermore, in the field of high frequency acoustic waves our group complements perfectly with the Research Team Surface Dynamics.

Our R&D approach allows us to address the complete technology chain of acoustic microsystems, comprising their CAD based design, the realization of advanced thin film systems incorporating multilayer and gradient films together with functional barrier layers, unconventional lithographic techniques for on-chip microstructure integration together with acoustic transducer structures, and the realization of easy-to-use microacoustic demonstrators. This approach is accompanied by dedicated analytical methods for e.g. film morphology (changes) and film stress evolution, device and film geometry, particle behavior in microfluidic structures under acoustic excitation and aerosol investigation, as well as analytical and numerical investigation of physical effects governing the device behavior, e.g. acoustic resonance effects and stress-associated device deterioration.

The research team Acoustic Microsystems is a core part of SAWLab Saxony - the scientific network for acoustoelectronics! At SAWLab Saxony, we are looking forward to contribute to the success of YOUR technology.