Pulsed Laser Deposition Lab

The IMW runs Physical Vapor Deposition (PVD) laboratories with two larger Pulsed Laser Deposition (PLD) clusters, a stand-alone PLD setup as well as two sputter deposition systems. The setup includes several UHV chambers with load lock systems for the preparation of epitaxial and polycrystalline magnetic, shape memory and superconducting thin films as well as for oxide heterostructures. Besides state-of-the-art RHEED systems for in-situ control of film growth, specialized systems are available for ion-beam assisted and off-axis PLD.


    • Two Coherent Excimer Lasers LPX 305 (248 nm, 25 ns, 50 Hz, max. 1 J)
    • Coherent Excimer Laser Compex 102 (248 nm, 25 nm, 20 Hz, max. 250 mJ)
    • UHV PLD systems with up to 8 targets, heated substrates, RHEED and/or AES, target and substrate transfer, 10-9 mbar or deposition under Ar, N2 or O2 pressure
    • HV PLD setup with 6 targets for ion-beam assisted deposition including RHEED
    • HV PLD setups with up to 7 targets and oxygen resistant heaters
    • UHV sputtering system with 5 targets (4” and 4*2”, 3” substrates up to 1000°C), base pressure 10-9 mbar, loadlock, rate monitor, for functional metallic films and combinatorial material science
    • HV sputter system with 2” target for metallic superconductors
    • All deposition systems are computer controlled with scripts for automated deposition and heat treatment

      Scientists in Charge

      Dr. Ruben Hühne: Superconductors and Oxide Films

      • High Temperature Superconductors: (Y,Gd)Ba2Cu3O7-x, La2(Ba,Sr,)CuO4
      • Fe-based Superconductors: Fe(Se,Te), BaFe2-x(Ni,Co)xAs2
      • Metallic Superconductors: Nb, NbN
      • Ferroelectric oxides: BaTi1-xZrxO3, Ba1-xSrxTiO3, PMN-PT
      • Functional Oxide Heterostructures: SrRuO3, La1-xSrxCoO3 etc.

      PD Dr. Sebastian Fähler: Metallic Films

      • Magnetic Shape Memory Alloys: Ni-Mn-Ga
      • Magnetocaloric and Thermomagnetic Films: Ni-Mn-Ga (Co, Cu,…), Antiperovskite
      • Shape Memory Films: NiTi
      • Hard Magnetic Films: Nd-Fe-B, FePt, CoPt…