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Eine junge Frau arbeitet an einer Glovebox im Chemielabor des IFW Dresden.


FIB Helios 5 CX

FIB in our lab
Sketch of the beam geometry in a dual beam FIB.
Scheme of 2-beam FIB (Modified from S. Menzel et al. Acta Metal. Slov. 10 (2004) 692), illustrating its principle of operation.

Focussed Ion Beam Microscope (FIB)

The Focussed Ion Beam (FIB) technology (FIB Helios 5 CX, ThermoScientific) is used for investigations in materials research or microelectronics, esp. for high contrast imaging of thin film microstructure using the channeling effect, cross section preparation, failure analysis, microstructuring, or thin film device modification. Using a focussed Gallium ion beam, it can precisely remove or deposit material at the sample surface on a submicron scale as well as image the sample surface or cross-section producing high quality contrast images with high magnifications.

Information from Equipment & Facilities from Micro/Nano Structures at Structure Analysis

Name of contact person group/department telephone number email address
Dr. Thomas Gemming Structure Analysis -298 T.Gemming(at)ifw-dresden.de