• non-destructive depth profile analysis of surfaces by measuring XPS data at surfaces of solid materials when changing the angle between analyzer acceptance axis and sample surface

• indirect depth profile information due to the change of the effective information depth changes with the angle - key parameter are the effective attenuation length (EAL) of the electrons used

• for quantification model calculation are inevitable, surface models have to be assumed, information content is limited

• additional limitations: EALs of the (unknown) surface layers have to be assumed, elastic scattering at high measuring angles, roughness influences

• experimentally sequential data acquisition with sample tilt or parallel detection with 2-dimensional detectors and special analyzer modes

• depth region 2 ... 10 nm depending on electron energy

Analytical features:

• (automatic) non-destructive angle dependent measurements (ARXPS)
• assumptions for the surface near structures from the measures spectra and from a priori information of the samples necessary
• look for the appropriate material parameters (density, EAL, ...)
• model calculations and optimization of the model solution with the measured intensities