Methods

Man in a blue shirt stands in front of a large metal chamber and holds a tool to a spiral device inside.

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Overview about available methods

The following methods are available and can be performed in the department:

(TEM) Transmission Electron Microscopy
SEM (Scanning Electron Microscopy)
- WDX (Wave Length Dispersive Spectroscopy
- EDX (Energy Dispersive X-ray Spectroscopy)
- EBSD (Electron Back-Scatter Diffraction)
FIB Focussed Ion Beam
- Imaging with Ions
- Structuring with Ions
- Local Deposition of Metal Films by Ions and Electrons (EBID & IBID)
Glow Discharge Optical Emission Spectrometry (GD-OES)
Surface Analysis
Nanomanipulation (in LM, SEM, FIB, TEM)
Deposition of Films with the Clustertool CARMEN
- DC magnetron co-sputtering of metals
- HF magnetron sputtering of metals and barrier films
- HF magnetron sputtering of insulators
- E-beam evaporation of metal

Great photo showing Dr. Gemming at TEM

Head of the department

Dr. Thomas Gemming

Tel.: +49 (351) 4659 298
Fax: +49 (351) 4659 9298
E-Mail: T.Gemming(at)ifw-dresden.de

Postal Delivery:
Dr. T. Gemming, IFW Dresden, Helmholtzstr. 20, 01069 DRESDEN, GERMANY

Visitors:
Helmholtzstr. 20, 01069 Dresden, Room A EG.03.1 (Main building, main entrance, turn left, 3^rd door)