Close-up of a technical device with multiple blue cylinders connected by white tubes labeled 'ALD'


Research NTFM

At Ruhr University Bochum we have an excellent infrastructure for thin film analysis. A broad variety of methods and devices enables a comprehensive characterization of thin films with respect to composition, structure, and morphology.


Frequently employed, group internally accessible techniques comprise 

  • (grazing incidence) X-ray diffraction (GI-XRD ),

  •  X-ray reflectometry (XRR ), 

  • infrared spectroscopy (IR ), 

  • Filmetrics, UV/Vis spectroscopy, 

  • and contact angle measurements. 

At the facilities of our collaboration partners at Ruhr University Bochum we have access to 

  • X-ray photoelectron spectroscopy (XPS ), 

  • Rutherford backscattering spectroscopy and nuclear reaction analysis (RBS/NRA ), 

  • Raman spectroscopy, 

  • ellipsometry, scanning electron microscopy (SEM ), 

  • transmission electron microscopy (TEM ) and 

  • atomic force microscopy (AFM ).