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Spectroscopy inside TEM (EELS/ELNES/EDX/EFTEM)

Image shows an overview of an electron energy loss spectrum
Example: EEL spectrum of NiO

Electron Energy Loss Spectroscopy (EELS)

Basis:

  • Element-specific energy losses of the beam electrons due to the inelastic interaction with the atoms during the penetration of the specimen


Possibilities:

  • Combined with STEM: chemical analysis including bondings on the nanometer scale, especially for light elements
  • Acquisition of linescan intensity profiles and element mappings for analysis of diffusion processes at interfaces and characterisation of segregations

Energy Filtered Transmission Electron Microscopy (EFTEM)

Basis:

  • Element-specific energy losses of the beam electrons due to the inelastic interaction with the atoms during the penetration of the specimen in combination with an imaging filter creating an energy dispersive plane within the optical path


Possibilities:

  • Chemical analysis on the nanometer scale in the fixed beam mode, especially for light elements
  • Acquisition of element mappings for analysis of diffusion processes at interfaces and characterisation of segregations in the fixed beam mode, i.e. with shorter measuring times than in the scanning mode
Image shows an overview of an X-ray spectrum
Example: EDX spectrum of NiO

Energy Dispersive X-ray Spectroscopy (EDXS)

Basis:

  • Emission of X-rays with element-specific energies after excitation of the atoms by the beam electrons during the penetration of the specimen


Possibilities:

  • Combined with STEM: chemical analysis on the nanometer scale, especially for medium-heavy and heavy elements
  • Acquisition of linescan intensity profiles and element mappings for analysis of diffusion processes at interfaces and characterisation of segregations
Great photo showing Dr. Gemming at TEM

Head of the department

Dr. Thomas Gemming

Tel.: +49 (351) 4659 298
Fax: +49 (351) 4659 9298
E-Mail: T.Gemming(at)ifw-dresden.de

Postal Delivery:
Dr. T. Gemming, IFW Dresden, Helmholtzstr. 20, 01069 DRESDEN, GERMANY

Visitors:
Helmholtzstr. 20, 01069 Dresden, Room A EG.03.1 (Main building, main entrance, turn left, 3rd door)